Method for scanning microscopy and scanning microscope

ABSTRACT

The disclosure relates to a method for scanning microscopy wherein a specimen is scanned simultaneously with a plurality of illumination spots of an excitation light. The light emitted by one specimen location irradiated with one illumination spot is detected independently of the light emitted by another specimen location illuminated with another illumination spot. A microscopic image of the specimen can be compiled from the emitted light detected for the different specimen locations. The method provides that the intensities of the different illumination spots are set independently of one another, and in that the illumination spots are guided over the specimen one after another in a scan line. The disclosure additionally relates to a scanning microscope.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation application of U.S. patentapplication Ser. No. 15/186,236, filed Jun. 17, 2016 (published asUS2016/0299326 A1), which, in turn, is a continuation of internationalpatent application PCT/EP2014/078202, filed Dec. 17, 2014, and claimingpriority from German application 10 2013 021 482.3, filed Dec. 17, 2013,and the entire content of the above applications is incorporated hereinby reference.

FIELD OF THE INVENTION

The present disclosure relates to a method for scanning microscopy andto a scanning microscope.

BACKGROUND OF THE INVENTION

In a method of the generic type, a specimen is scanned simultaneouslywith a plurality of illumination spots of an excitation light, and thelight emitted by one specimen location irradiated with one illuminationspot is detected independently of the light emitted by another specimenlocation illuminated with another illumination spot. A microscopic imageof the specimen can be compiled from the emitted light detected for thedifferent specimen locations.

A scanning microscope of the generic type comprises the followingcomponent parts: a light source for emitting excitation light, anoptical separating device for spatially separating the excitation lightinto a plurality of illumination beams for a plurality of illuminationspots, optical means for guiding the excitation light onto a specimenand for guiding light emitted by the specimen onto a detector unit, ascanning device for scanning the specimen with the plurality ofillumination spots, and the detector unit for separately detecting thelight emitted by the specimen locations illuminated by the differentillumination spots.

Such a method of the generic type and such a scanning microscope of thegeneric type are described for example in U.S. Pat. No. 6,028,306.

In scanning microscopy methods requiring more than one recording, theimage recordings are customarily carried out temporally successivelyusing the same excitation beam. In this case, either complete images orindividual lines are recorded successively using the same excitationspot. In the case of so-called HDR microscopy (High Dynamic RangeMicroscopy), for example, three successive images with three differentexcitation intensities are recorded and subsequently computed with oneanother. Owing to the finite recording speed, in this case, incomparison with a method in which only one image is recorded, thetemporal resolution is worsened or, in other words, the temporallyresolvable specimen dynamic characteristic is restricted.

The dynamic range of present-day photodetectors, particularly for laserscanning microscopy, is often inadequate to resolve simultaneouslyfirstly very fine and dark structures and secondly very bright imageregions equally sensitively. In fluorescence microscopy, therefore,parts of the image are often overmodulated and/or other parts are nolonger distinguishable from the background noise.

Furthermore, the photodamage of cells and tissue as a result ofintensive illumination heretofore has been one of the key factors whichcrucially limits the number of possible image recordings of living cellsand hence the measurement time.

In the field of laser scanning microscopy, the limits of what isfeasible are thus often encountered when the minimization of bleachingeffects and optimization of the detector modulation are involved.Although these problems are addressed particularly well with theprinciple of photon counting, the advantages of a high signal-to-noiseratio are bought here at the expense of a comparatively low dynamicrange. The counting becomes nonlinear starting from counting rates ofapproximately 10 MHz and is also virtually impossible to correctstarting from approximately 30 MHz. Therefore, a user must constantlykeep the illumination of the specimen in an optimum range, not least inorder to protect the photomultiplier operated at maximum high voltagefrom being destroyed.

There are essentially three techniques available nowadays for extendingthe dynamic range. Firstly, it is possible to use better detectors, thatis, for example cameras having an extremely high dynamic range. However,dynamic range depths of 16 bits nowadays for microscopy have scarcelybeen achieved heretofore. The use of high-sensitivity CCD cameras havingan extremely large dynamic range is scarcely employed in laser scanningmicroscopy on account of stray light.

The problem of inadequate dynamic range can furthermore be circumventedin a comparatively simple form with a plurality of images which arerecorded with different exposure and are subsequently computed. Thedisadvantage of this method is not only the significantly greaterspecimen loading, but also the recording time required. This is notpossible or at any rate not optimal for many applications, particularlyin measurements on living cells.

Finally, a method designated as “Controlled Light Exposure Microscopy”,also abbreviated to CLEM, was proposed in United States patentapplication publication 2006/0120065. For laser scanning microscopy, inthis case, the exposure time is controlled with pixel accuracy duringthe scanning image recording in a fast feedback control by a procedurein which when a specific threshold value is reached in the detector, theillumination for the respective pixel is switched off and the exposureis thus terminated.

There have been two approaches heretofore for so-called DI microscopy(Dynamic Illumination microscopy). In a first method variant, a completeimage of a specimen or of a specimen region is recorded and, on thebasis of the image, a specific excitation intensity is subsequentlycalculated for each individual pixel. With this calculated intensity,the relevant pixel is then illuminated in a second recording of thespecimen or of the specimen region. Two recordings are necessary in thismethod, for which reason here, too, the temporal resolution is worsenedand the possibilities of observing rapidly variable processes in aliving biological specimen are accordingly restricted.

In a second embodiment variant of DI microscopy, an intensity of thelight emitted by a specimen location is used directly as feedback for acontrol of the intensity incident on precisely this specimen location.This necessitates a very fast control, in particular in order to avoid asaturation of the detectors used. This is described for example inUnited States patent application publications 2010/0208339 and2014/0029091.

SUMMARY OF THE INVENTION

It is an object of the invention to provide a method for scanningmicroscopy and a scanning microscope which can be used advantageously inparticular for HDR and DI microscopy.

A method of the invention is directed to scanning microscopy includingthe steps of: scanning a specimen simultaneously with a plurality ofillumination spots of an excitation light wherein the illumination spotscorrespond to respective locations on the specimen; establishing thelight emitted from one of the specimen locations independently from thelight emitted from another one of the specimen locations illuminated byanother one of the illumination spots; assembling a microscopic image ofthe specimen for the emitted light established for the differentspecimen locations; adjusting the intensities of corresponding ones ofthe illumination spots independently of one another; and, guiding theillumination spots over the specimen one behind the other along a scanline.

The method of the type mentioned above is developed according to thedisclosure in that the intensities of the different illumination spotsare set independently of one another, and the illumination spots areguided over the specimen one after another in a scan line.

The microscope of the type mentioned above is developed according to thedisclosure in that setting means for independently setting theintensities of the illumination beams are present, and the separatingdevice and the scanning device for scanning the specimen are configuredin such a way that the illumination spots are guided over the specimenone after another in a scan line.

It may be regarded as a first basic concept of the present disclosurethat the excitation or illumination spots are no longer guided indifferent lines over a specimen or a specimen region, but rather arecaused to run one after another in the same line. In this case, theseparate illumination spots are provided with the aid of an opticalseparating device which separates the excitation light of the lightsource into a plurality of illumination beams. It is additionallyessential to the invention that the intensity emitted by specimenlocations adjacent to one another, namely adjacent to one another in thesame scan line, is detected in each case independently.

Excitation light within the meaning of the disclosure described here iselectromagnetic radiation, which is taken to mean in particular theinfrared, visible and ultraviolet parts of the spectrum. In principle,all sources which provide the desired electromagnetic radiation withsufficient intensity may be used as light sources. Lasers are usuallyused for this purpose. In principle, however, light emitting diodes orother illuminants may also be used.

In principle, all detectors which detect the light reflected back fromthe specimen sufficiently effectively and with a sufficiently goodsignal-to-noise ratio may be used as detectors. In principle,semiconductor detectors may also be used for this purpose. Since themain application of the present microscopy techniques is fluorescencemicroscopy, where the counting rates generally are comparatively low,photomultipliers are usually used.

In a first particularly preferred embodiment variant of the methodaccording to the disclosure, a leading illumination spot, which may alsobe referred to as a pilot spot, and a trailing illumination spot areguided over the specimen and an intensity of the light reflected backfrom or emitted by a specimen location that is measured for the leadingillumination spot is used for setting an intensity of the trailingillumination spot if the trailing illumination spot impinges on thespecimen location.

Accordingly, at least two illumination spots are used which are scannedat a, more particularly constant, distance over the same line of thespecimen. In this case, the brightness of the second, that is, thetrailing, illumination spot is controlled in accordance with the basicconcept of dynamic illumination microscopy on the basis of the responsesignal generated by the first illumination spot, that is, the lightreflected back from the respective specimen location, of the specimen.All advantages of the DIM method can then be achieved for the imagerecorded with the second illumination spot. By way of example, thedetectors can be operated in a targeted manner in a range where thesignal-to-noise ratio is particularly high and, moreover, bleaching ofthe colorants can be reduced to a minimum.

What is particularly important for this method variant is that theintensity of each individual illumination spot is set independently.According to the disclosure, therefore, the setting means for separatelysetting the intensities of the different illumination spots are present.

In particular, drivable components, for example acousto-opticalelements, such as AOMs, AODs and/or AOTFs, may be used as setting means.

In a further particularly advantageous variant of the method accordingto the disclosure, more than two, in particular three, illuminationspots are guided over the specimen, and the intensity of theillumination spots rises from a leading or first illumination spot to alast illumination spot. This method variant enables the recording ofmicroscopic images with a particularly high intensity dynamic range.This technique is referred to as HDR microscopy, as explained above.

What is important for all variants according to the disclosure is thepossibility of generating two or more excitation beams which differ inthe angle in the fast scanning direction in a back focal plane of anobjective used. That is, in other words that the illumination spots inone and the same scan line rapidly succeed one another. The intensity ofthe excitation beams, which are also referred to as illumination beams,may be set independently of one another according to the disclosure.

The intensities of the different illumination spots may be setdifferently, and in particular fixedly, in particular for HDRmicroscopy. For this purpose, beam splitters and/or beam attenuators maybe used as setting means for separately setting the intensities of thedifferent illumination spots.

In principle, different scanning devices and different optical units maybe used for generating the plurality of illumination spots. Particularlypreferably, however, in each case the same microscope objective and thesame scanning device are used for guiding the different illuminationspots onto the specimen.

In principle, the separating device for spatially separating theexcitation light into a plurality of illumination beams may bepositioned at any location of the excitation beam path. Particularlypreferably, the separating device is arranged in the beam path betweenthe light source and the scanning device.

The image data obtained with the plurality of illumination spots mayexpediently be computed to form a common image.

What is essential to the present invention is the generation of aplurality of illumination or excitation spots adjacent to one another ina scan line, wherein the light emitted by the specimen locationsilluminated with the illumination spots can be detected independently ofone another. In particular, according to the disclosure, the differentillumination spots may additionally be set independently of one anotherin terms of their intensity.

For the application example of HDR microscopy by scanning a plurality ofsuccessive illumination spots in the same scan line of a specimen, it ispossible to accelerate the image recording overall by a factorcorresponding to the number of illumination spots. Processes in a livingbiological specimen can therefore be observed with a correspondinglygreater temporal dynamic range. For such measurements, for the intensityratios of the individual illumination spots it is merely necessary toensure that the leading beam has the lowest intensity and theintensities of the illumination beams that follow in the scan linebecome greater from beam to beam. This may be realized for example bymeans of beam splitters and beam attenuators.

For the application example of dynamic illumination microscopy, thespatial and thus also temporal distance between the leading illuminationspot, which is also referred to as pilot spot or pilot beam, and thetrailing illumination spot is used to calculate the intensity to be setfor the second illumination spot if the second illumination spotimpinges on the corresponding specimen location. In other words,therefore, on the basis of the specimen response of a specific specimenlocation after irradiation with the leading illumination spot, anintensity for the second illumination spot is calculated if the latteris incident on the specimen location.

The requirement made of the speed of the control can therefore bereduced with the method according to the disclosure and this requirementis at any rate lower than for a situation in which the illuminationintensity is intended to be readjusted still during a residence durationof an illumination spot on a specimen location. With a rate of xpixels/microsecond and a distance between the two excitation spots inthe scan line of y pixels, a time which a signal is permitted to need topass through the control system will be approximately y/x. In comparisontherewith, this time in the case of a direct control is less than 1/xand is accordingly lower by a factor of y.

The microscope according to the disclosure, which is suitable inparticular for carrying out the method according to the disclosure, maybe a confocal microscope. By way of example, the detector unit may haveconfocal detectors. A detector is referred to as confocal if it itselfor a stop upstream of the detector is positioned in or in proximity to aconfocal plane. The term confocal plane denotes a plane of the detectionbeam path which is optically conjugate with respect to a specimen-sidefocal plane of the microscope objective. A stop arranged in a confocalplane, for example upstream of a detector, restricts the light captureof the detector to a small target volume at the specimen location.Correspondingly, for a confocal light source, the illumination of thespecimen is restricted to a small target value on or in the specimen.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will now be described with reference to the drawingswherein:

FIG. 1 shows a first embodiment of a scanning microscope according tothe invention; and,

FIG. 2 shows a second embodiment of a scanning microscope according tothe invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS OF THE INVENTION

A first embodiment of a method according to the disclosure and of ascanning microscope 100 according to the disclosure is explained withreference to FIG. 1. A light source 10, in particular a laser, foremitting excitation light 12, optical means (20, 30, 40, 50) and also adetector unit 60 are shown therein as essential components.

As part of the optical means, firstly an optical separating device 20 ispresent, which separates the excitation light 12 into a plurality ofillumination beams (14, 16, 18), wherein the illumination beams (14, 16,18) serve for generating a plurality of different illumination spots(54, 56, 58) on a specimen 70.

A further component part of the optical means is a main chromaticsplitter 40, through which the illumination beams (14, 16, 18) pass.Thereafter, the illumination beams (14, 16, 18) pass via an optical unit34 onto a scanning device 30, by which they are scanned over thespecimen 70 according to the disclosure such that the illumination spots(54, 56, 58), as illustrated schematically in FIG. 1, are guided overthe specimen 70 alongside one another or, synonymously, one afteranother in a scan line 72. In the example shown in FIG. 1, the scanningdirection is the negative x-direction, which is shown on the basis ofthe schematically illustrated coordinate system.

By means of a microscope objective 50, the illumination spots (54, 56,58) are then focused onto or into the specimen and illuminate specimenlocations (74, 76, 78) there, as shown in FIG. 1. In reaction to theincident excitation light, light (84, 86, 88) is emitted by the specimenlocations (74, 76, 78) and is guided via the same microscope objective50 back onto the scanner 30 and the main chromatic splitter 40.

For the important application of fluorescence microscopy, thefluorescent light reflected back generally has longer wavelengths thanthe excitation light. The main chromatic splitter 40 is constituted suchthat light of the higher wavelengths is reflected. The light (84, 86,88) emitted by the specimen locations (74, 76, 78) is accordinglyforwarded with the aid of the optical unit 67 in the direction of aconfocal diaphragm 69 and the detector unit 60.

In the detector unit 60, a separate detector (64, 66, 68) is present foreach of the illumination spots (54, 56, 58), such that the emitted light(84, 86, 88) of the specimen 70 that is generated by the illuminationspots (54, 56, 58) can be detected separately in each case for eachilluminated specimen location (74, 76, 78). A single confocal diaphragm69 is positioned upstream of the detectors (64, 66, 68) in theembodiment shown, such that the arrangement 100 illustrated in FIG. 1 issuitable overall for carrying out confocal microscopy. In principle, aseparate confocal diaphragm may also be arranged upstream of eachindividual detector (64, 66, 68).

What is essential to the present invention in the embodiment of FIG. 1is that the specimen 70 is scanned simultaneously with a plurality ofillumination spots (54, 56, 58), wherein the illumination spots (54, 56,58) are guided over the specimen in one and the same scan line 72. Whatis important and essential for the invention, moreover, is that theintensities of the different illumination spots can be set independentlyof one another. In the embodiment shown, the intensity I(54) of theillumination spot 54 is less than the intensity I(56) of theillumination spot 56, which is in turn less than the intensity I(58) ofthe illumination spot 58.

These magnitude relations are represented in FIG. 1 by the inequalityI(14)<I(16)<I(18).

This choice of the intensities of the individual illumination spots (54,56, 58) can advantageously reduce bleaching of the colorants to aminimum and it is possible to achieve microscopic images with a veryhigh brightness dynamic. This method is referred to as HDR microscopy.The suitable setting of the intensities is effected with the aid ofsetting means (24, 26, 28) illustrated schematically in FIG. 1, whichare disposed downstream of the separating device 20 and attenuate theillumination beams (14, 16, 18) to the desired intensity. This may bedone in principle with the aid of beam splitters or beam attenuators. Toachieve the advantage of bleaching reduction that is desired for HDRmicroscopy, it is important for the first or leading illumination spot54 in the scanning direction to have the lowest intensity and the lastillumination spot 58 to have the highest intensity. FIG. 1 illustratesthe scanning direction along the scan line 72 by an arrow 73.

The detector unit 60 is connected to a control and evaluation unit 90,which is illustrated schematically by an arrow 96 in FIG. 1. In thecontrol and evaluation unit 90, for example, the measurement datasupplied by the detectors (64, 66, 68) can be computed to form a singleimage. In principle, the control and evaluation unit 90 may beoperatively connected to the setting means (24, 26, 28), which may inparticular also be drivable components, for example acousto-opticalcomponents.

A further embodiment of a scanning microscope according to thedisclosure, which is suitable for carrying out DI microscopy (DynamicIllumination Microscopy), is explained with reference to FIG. 2. Theessential component parts of the scanning microscope 100 shown thereincorrespond to those of the first embodiment shown in FIG. 1. In general,identical or identically acting component parts are identified by thesame reference numerals in the figures.

In a departure from the variant of a scanning microscope 100 shown inFIG. 1, in FIG. 2 only two illumination spots, namely a leadingillumination spot 54 and a trailing illumination spot 58, are guidedover the specimen 70 in one and the same scan line 72. Accordingly, inthis example, the detector unit 60 has only two detectors (64, 68), witha confocal diaphragm 69 positioned upstream thereof. In principle, as inthe embodiment of FIG. 1, it is possible here, too, for each detector tohave a dedicated confocal diaphragm and/or a dedicated detector opticalunit.

The measurement information of the detector unit 60, that is, themeasurement information items of the detectors (64, 68), are fed to acontrol and evaluation unit 90, which is shown schematically by thearrow 96 in FIG. 2. The measurement information supplied by the detector64 corresponds to the light 84 emitted by or reflected back from thespecimen location 74 illuminated by the leading illumination spot 54, inthe situation illustrated in FIG. 2, as a response to the illuminationspot 54.

The control and evaluation unit 90, for supplying actuating signals, isoperatively connected to a setting means 25 for the illumination beam 14and to a setting means 29 for the illumination beam 18, which isillustrated by the arrow 92 in FIG. 2. On the basis of the measurementinformation supplied by the detector 64 for the specimen location 74,the control and evaluation unit 90 calculates a manipulated variable forthe setting means 29, which sets the intensity of the illumination beamwhen the illumination beam 18 impinges as trailing illumination spot onthe specimen location 74.

The setting means (25, 29) may preferably be acousto-optical settingmeans, such as AOM and AOTF. With the aid of AOTFs, in principle, theintensities of a plurality of colors can also be set in a targetedmanner and rapidly. In comparison with known arrangements for DImicroscopy, with the method described here the requirement made of thespeed of the control can be reduced because the latter need no longer beso rapid that the control of the excitation intensity must be effectedstill during the residence duration of the excitation spot on a specificspecimen location. On the other hand, the solution proposed here issignificantly faster than the variants in which firstly a whole image ofa specimen is recorded and afterward the specimen is subjected onceagain then to the calculated new point-specific intensities.

The fundamental functional dependence of the intensity I(18) of theillumination beam 18 on the intensity measured for the light 84 isrepresented in FIG. 2 by the equation

I(18)=f(I(84)).

The present disclosure provides a scanning microscope and a method forscanning microscopy which, in particular for HDR microscopy and DImicroscopy, enable considerable improvements and simplifications whichcan be realized with little outlay on apparatus.

The optical arrangements shown in FIGS. 1 and 2 are of exemplary nature.In variants with respect thereto, for example, the specimen could alsobe illuminated using transmitted light. Moreover, in principle, therelative arrangement of the specimen and the detector with respect tothe main chromatic splitter 40 may be such that the illumination beams(14, 16, 18) are reflected by the main chromatic splitter 40; however,fluorescent light passes through the main chromatic splitter.

It is understood that the foregoing description is that of the preferredembodiments of the invention and that various changes and modificationsmay be made thereto without departing from the spirit and scope of theinvention as defined in the appended claims.

LIST OF REFERENCE NUMERALS

-   10 Light source-   12 Excitation light-   14 Illumination beam-   16 Illumination beam-   18 Illumination beam-   20 Optical separating device-   24, 25, 26, 28, 29 Setting means for separately setting the    intensity-   30 Scanning device-   34 Optical unit-   40 Main chromatic splitter-   50 Microscope objective-   54 Illumination spot-   56 Illumination spot-   58 Illumination spot-   60 Detector unit-   64 Detector unit-   66 Detector unit-   67 Optical unit-   68 Detector unit-   69 Confocal diaphragm-   70 Specimen-   72 Scan line-   73 Scanning direction-   74 Specimen location-   76 Specimen location-   78 Specimen location-   84 Light emitted by specimen location 74-   86 Light emitted by specimen location 76-   88 Light emitted by specimen location 78-   20, 30, 40, 50 Optical means-   90 Control and evaluation unit-   92 Arrow-   96 Arrow

1. A method directed to scanning microscopy comprising the steps of:providing an excitation light and providing a plurality of illuminationspots of the excitation light with the aid of an optical separatingdevice which separates the excitation light into a plurality ofillumination beams, wherein the excitation light is provided by a solelight source; scanning a specimen simultaneously with the plurality ofillumination spots of the excitation light wherein said illuminationspots correspond to respective locations on said specimen; establishingthat the light emitted from one of said specimen locations isindependent of the light emitted from another one of said specimenlocations illuminated by another one of said illumination spots;assembling a microscopic image of said specimen for the emitted lightestablished for the different specimen locations; adjusting therespective intensities of said illumination spots independently of oneanother; guiding said illumination spots over said specimen one behindthe other along a scan line with said scan line being one and the samescan line for all of said illumination spots; said plurality ofillumination spots being greater than two in number; and, wherein theintensity of the illumination spot from a leading illumination spotincreases up to a last illumination spot.
 2. The method of claim 1,wherein said illumination spots are three in number.
 3. The method ofclaim 1, wherein measurement values, which are obtained for saidillumination spots, are compiled to a common image.
 4. The method ofclaim 1, wherein a same microscope and a same scanning device are usedto guide each of the different illumination spots over the specimen. 5.A method directed to scanning microscopy comprising the steps of:providing an excitation light and providing a plurality of illuminationspots of the excitation light with the aid of an optical separatingdevice which separates the excitation light into a plurality ofillumination beams, wherein the excitation light is provided by a solelight source; scanning a specimen simultaneously with the plurality ofillumination spots of the excitation light wherein said illuminationspots correspond to respective locations on said specimen; establishingthat the light emitted from one of said specimen locations isindependent of the light emitted from another one of said specimenlocations illuminated by another one of said illumination spots;assembling a microscopic image of said specimen for the emitted lightestablished for the different specimen locations; adjusting therespective intensities of said illumination spots independently of oneanother; guiding said illumination spots over said specimen one behindthe other along a scan line with said scan line being one and the samescan line for all of said illumination spots; said plurality ofillumination spots being greater than two in number; and, wherein theintensities of the different illumination spots are adjusteddifferently.
 6. The method of claim 5, wherein said illumination spotsare three in number.
 7. The method of claim 5, wherein measurementvalues, which are obtained for said illumination spots, are compiled toa common image.
 8. The method of claim 5, wherein a same microscope anda same scanning device are used to guide each of the differentillumination spots over the specimen.
 9. A method directed to scanningmicroscopy comprising the steps of: providing an excitation light andproviding a plurality of illumination spots of the excitation light withthe aid of an optical separating device which separates the excitationlight into a plurality of illumination beams, wherein the excitationlight is provided by a sole light source; scanning a specimensimultaneously with the plurality of illumination spots of theexcitation light wherein said illumination spots correspond torespective locations on said specimen; establishing that the lightemitted from one of said specimen locations is independent of the lightemitted from another one of said specimen locations illuminated byanother one of said illumination spots; assembling a microscopic imageof said specimen for the emitted light established for the differentspecimen locations; adjusting the respective intensities of saidillumination spots independently of one another; guiding saidillumination spots over said specimen one behind the other along a scanline with said scan line being one and the same scan line for all ofsaid illumination spots; said plurality of illumination spots beinggreater than two in number; and, wherein the intensities of thedifferent illumination spots are fixedly adjusted.
 10. The method ofclaim 9, wherein said illumination spots are three in number.
 11. Themethod of claim 9, wherein measurement values, which are obtained forsaid illumination spots, are compiled to a common image.
 12. The methodof claim 9, wherein a same microscope and a same scanning device areused to guide each of the different illumination spots over thespecimen.
 13. A scanning microscope for carrying out a method directedto scanning microscopy, the scanning microscope comprising: a lightsource for emitting an excitation light; an optical separating devicefor spatially unraveling said excitation light from said light sourceinto several illumination beams for respective illumination spots; adetector unit; an optics unit for guiding said excitation light onto aspecimen and for guiding light emitted from said specimen to saiddetector unit; a scanning device for scanning said specimen with saidillumination spots; said detector unit being configured to separatelyestablish the light emitted from the different specimen locationsilluminated by the different illumination spots; an adjusting device forindependently adjusting the intensities of said illumination beams; saidseparating device and said scanning device being configured so as tocause said illumination spots to be guided over said specimen one behindthe other in a scan line with said scan line being one and the same scanline for all of said illumination spots; wherein said light source is asole light source for said several illumination beams; and, wherein theintensity of the illumination spot from a leading illumination spotincreases up to a last illumination spot.
 14. The scanning microscope ofclaim 13, wherein: said light source and said scanning device conjointlydefine a beam path; and, said optical separating device is mounted insaid beam path between said light source and said scanning device. 15.The scanning microscope of claim 13, wherein said adjusting device is atleast one of a beam splitter and a beam attenuator.
 16. The scanningmicroscope of claim 13, wherein said adjusting device includes driveablecomponents.
 17. The scanning microscope of claim 16, wherein saiddriveable components include acoustic components.
 18. The scanningmicroscope of claim 17, wherein said acoustic components include AOTF,AOM and AOD.
 19. The scanning microscope of claim 13, wherein saidscanning microscope is a confocal scanning microscope.
 20. A scanningmicroscope for carrying out a method directed to scanning microscopy,the scanning microscope comprising: a light source for emitting anexcitation light; an optical separating device for spatially unravelingsaid excitation light from said light source into several illuminationbeams for respective illumination spots; a detector unit; an optics unitfor guiding said excitation light onto a specimen and for guiding lightemitted from said specimen to said detector unit; a scanning device forscanning said specimen with said illumination spots; said detector unitbeing configured to separately establish the light emitted from thedifferent specimen locations illuminated by the different illuminationspots; an adjusting device for independently adjusting the intensitiesof said illumination beams; said separating device and said scanningdevice being configured so as to cause said illumination spots to beguided over said specimen one behind the other in a scan line with saidscan line being one and the same scan line for all of said illuminationspots; wherein said light source is a sole light source for said severalillumination beams; and, wherein the intensities of the differentillumination spots are adjusted differently.
 21. The scanning microscopeof claim 20, wherein: said light source and said scanning deviceconjointly define a beam path; and, said optical separating device ismounted in said beam path between said light source and said scanningdevice.
 22. The scanning microscope of claim 20, wherein said adjustingdevice is at least one of a beam splitter and a beam attenuator.
 23. Thescanning microscope of claim 20, wherein said adjusting device includesdriveable components.
 24. The scanning microscope of claim 23, whereinsaid driveable components include acoustic components.
 25. The scanningmicroscope of claim 24, wherein said acoustic components include AOTF,AOM and AOD.
 26. The scanning microscope of claim 20, wherein saidscanning microscope is a confocal scanning microscope.
 27. A scanningmicroscope for carrying out a method directed to scanning microscopy,the scanning microscope comprising: a light source for emitting anexcitation light; an optical separating device for spatially unravelingsaid excitation light from said light source into several illuminationbeams for respective illumination spots; a detector unit; an optics unitfor guiding said excitation light onto a specimen and for guiding lightemitted from said specimen to said detector unit; a scanning device forscanning said specimen with said illumination spots; said detector unitbeing configured to separately establish the light emitted from thedifferent specimen locations illuminated by the different illuminationspots; an adjusting device for independently adjusting the intensitiesof said illumination beams; said separating device and said scanningdevice being configured so as to cause said illumination spots to beguided over said specimen one behind the other in a scan line with saidscan line being one and the same scan line for all of said illuminationspots; wherein said light source is a sole light source for said severalillumination beams; and, wherein the intensities of the differentillumination spots are fixedly adjusted.
 28. The scanning microscope ofclaim 27, wherein: said light source and said scanning device conjointlydefine a beam path; and, said optical separating device is mounted insaid beam path between said light source and said scanning device. 29.The scanning microscope of claim 27, wherein said adjusting device is atleast one of a beam splitter and a beam attenuator.
 30. The scanningmicroscope of claim 27, wherein said adjusting device includes driveablecomponents.
 31. The scanning microscope of claim 30, wherein saiddriveable components include acoustic components.
 32. The scanningmicroscope of claim 31, wherein said acoustic components include AOTF,AOM and AOD.
 33. The scanning microscope of claim 27, wherein saidscanning microscope is a confocal scanning microscope.